A Systematic Method for Predictive In Silico Chemical Vapor Deposition-Reference-Cited by-同舟云学术

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A Systematic Method for Predictive In Silico Chemical Vapor Deposition

Published:2020-03-19 Issue:14 Volume:124 Page:7725-7736
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Danielsson Örjan¹²^ORCID,Karlsson Matts³,Sukkaew Pitsiri¹,Pedersen Henrik¹^ORCID,Ojamäe Lars¹^ORCID

Affiliation:

1. Department of Physics, Chemistry and Biology, Linköping University, Linköping, SE-581 83, Sweden

2. Physicomp AB, Liljanstorpsvägen 20, Västerås, 722 46, Sweden

3. Department of Management and Engineering, Linköping University, Linköping, SE-581 83, Sweden

Funder

Vetenskapsr?det

Knut och Alice Wallenbergs Stiftelse

Stiftelsen f?r?Strategisk Forskning

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

http://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.9b10874

Reference58 articles.

1. Chemical vapour deposition of coatings

2. Studying chemical vapor deposition processes with theoretical chemistry

3. Shortcomings of CVD modeling of SiC today

4. A Mathematical Model of the Coupled Fluid Mechanics and Chemical Kinetics in a Chemical Vapor Deposition Reactor

5. Gas‐Phase and Surface Reaction Mechanisms in MOCVD of GaAs with Trimethyl‐Gallium and Arsine

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A layered aerogel composite with silica fibers, SiC nanowires, and silica aerogels ternary networks for thermal insulation at high-temperature;Journal of Materials Science & Technology;2025-01

2. Atomistic insights into predictive in silico chemical vapor deposition;Materials Advances;2024

3. Density Functional Theory Insight into Chemical Vapor Infiltration;Methane;2023-11-09

4. Multiscale atomistic modelling of CVD: From gas-phase reactions to lattice defects;Materials Science in Semiconductor Processing;2023-11

5. Superconformal silicon carbide coatings via precursor pulsed chemical vapor deposition;Journal of Vacuum Science & Technology A;2023-04-27

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