Synthesis of Metal Nanoparticles and Patterning in Polymeric Films Induced by Electron Nanobeam-Reference-Cited by-同舟云学术

Synthesis of Metal Nanoparticles and Patterning in Polymeric Films Induced by Electron Nanobeam

Published:2017-02-24 Issue:9 Volume:121 Page:5335-5340
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Yamamoto Hiroki¹,Kozawa Takahiro¹,Tagawa Seiichi¹,Naito Muneyuki²,Marignier Jean-Louis³,Mostafavi Mehran³,Belloni Jacqueline³^ORCID

Affiliation:

1. The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Osaka, 567-0047 Japan

2. Department of Chemistry, Konan University, 8-9-1 Okamoto Higashinada, Kobe, Hyogo 658-8501, Japan

3. Laboratoire de Chimie Physique, ELYSE, Université Paris-Sud, Bât. 349, 91405 Orsay, France

Funder

Ministry of Education, Culture, Sports, Science and Technology

Centre National de la Recherche Scientifique

Institute of Scientific and Industrial Research, Osaka University

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.6b12543

Reference21 articles.

1. Fabrications and Applications of Stimulus-Responsive Polymer Films and Patterns on Surfaces: A Review

2. Imprint of sub‐25 nm vias and trenches in polymers

3. Chemical and Structural Investigation of High-Resolution Patterning with HafSOx

4. Introduction to Microlithography,2nd ed.Thompson, L. F.; Willson, C. G.; Bowden, M. J., Eds.ACS Professional Reference Book,American Chemical Society:Washington, DC, 1994; p237.

5. Ion Beam “Photography”: Decoupling Nucleation and Growth of Metal Clusters in Glass

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