Entropic Effects on the Free Energies of Clusters in Silane Plasmas
Author:
Affiliation:
1. Department of Chemistry, Supercomputing Institute, and Chemical Theory Center, University of Minnesota, Minneapolis, Minnesota 55455-0431, United States
Funder
National Science Foundation
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.5b00923
Reference47 articles.
1. Numerical study of the effect of gas temperature on the time for onset of particle nucleation in argon–silane low-pressure plasmas
2. Computational Thermochemistry of Medium-Sized Silicon Hydrides
3. Thermochemistry and Kinetics of Silicon Hydride Cluster Formation during Thermal Decomposition of Silane
4. Modelling of silicon hydride clustering in a low-pressure silane plasma
5. Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas
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