Study on Structural, Mechanical, and Optical Properties of Al2O3–TiO2 Nanolaminates Prepared by Atomic Layer Deposition-Reference-Cited by-同舟云学术

Study on Structural, Mechanical, and Optical Properties of Al2O3–TiO2 Nanolaminates Prepared by Atomic Layer Deposition

Published:2015-08-26 Issue:35 Volume:119 Page:20591-20599
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Iatsunskyi Igor,Coy Emerson,Viter Roman¹,Nowaczyk Grzegorz,Jancelewicz Mariusz,Baleviciute Ieva²³,Załęski Karol,Jurga Stefan

Affiliation:

1. Institute of Atomic Physics and Spectroscopy, University of Latvia, 19, Raina Blvd., LV 1586, Riga, Latvia

2. Department of Chemistry, Vilnius University, Naugarduko str. 24, LT-03225 Vilnius, Lithuania

3. Laboratory of BioNanoTechnology, Semiconductor Physics Institute, State Research Institute Center for Physical and Technological Sciences, A. Gostauto11, LT-01108 Vilnius, Lithuania

Funder

Narodowe Centrum Badan i Rozwoju

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.5b06745

Reference42 articles.

1. Composition, surface morphology and electrical characteristics of Al2O3–TiO2 nanolaminates and AlTiO films on silicon

2. Interface-controlled high dielectric constant Al2O3/TiOx nanolaminates with low loss and low leakage current density for new generation nanodevices

3. Dielectric characteristics of Al2O3–HfO2 nanolaminates on Si(100)

4. Carbon nanotube–metal nano-laminate for enhanced mechanical strength and electrical conductivity

5. Indentation mechanics and fracture behavior of metal/ceramic nanolaminate composites

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