Atomic Layer Deposition of Metal Tellurides and Selenides Using Alkylsilyl Compounds of Tellurium and Selenium
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry, Department of Chemistry, FI-00014 University of Helsinki, Finland
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja8090388
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