Volatility by Design. Synthesis and Characterization of Polyether Adducts of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium and Their Implementation as Metal−Organic Chemical Vapor Deposition Precursors
Author:
Affiliation:
1. Department of Chemistry, the Materials Research Center, and the Science and Technology Center for Superconductivity, Northwestern University, Evanston, Illinois 60208-3113
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm9700108
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