1. Chemical Vapour Deposition: Precursors, Processes and Applications , ed. A. C. Jones and M. L. Hitchman , Royal Society of Chemistry Publishing , London , 2009
2. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
3. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
4. M. A.Malik and P.O'Brien , Basic chemistry of CVD and ALD precursors in Chemical Vapour Deposition: Precursors, Processes and Applications , ed. A. C. Jones and M. L. Hitchman , Royal Society of Chemistry Publishing , London , 2009 , pp. 207–271
5. R. C.Mehrotra , R.Bohra and D. P.Gaur , Metal β-diketonates and allied derivatives , Academic Press , London, New York , 1978