Fundamental Proximity Effects in Focused Electron Beam Induced Deposition-Reference-Cited by-同舟云学术

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Fundamental Proximity Effects in Focused Electron Beam Induced Deposition

Published:2011-12-23 Issue:1 Volume:6 Page:286-294
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Plank Harald¹²,Smith Daryl A.³,Haber Thomas²,Rack Philip D.³⁴,Hofer Ferdinand¹²

Affiliation:

1. Institute for Electron Microscopy, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria

2. Center for Electron Microscopy, Steyrergasse 17, 8010 Graz, Austria

3. Materials Science and Engineering, The University of Tennessee, 603 Dougherty Hall, Knoxville, Tennessee 37996-2200, United States

4. Center for Nanophase Materials Sciences, Oak Ridge National Laboratories, Oak Ridge, Tennessee 37831, United States

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/nn204237h

Reference67 articles.

1. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

2. Spatial resolution limits in electron-beam-induced deposition

3. Gas-assisted focused electron beam and ion beam processing and fabrication

4. A critical literature review of focused electron beam induced deposition

5. Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition

Cited by 52 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoscale Ruthenium-Containing Deposits from Ru(CO)₄I₂ via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond;ACS Applied Nano Materials;2022-03-14

2. Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology;Magnetochemistry;2021-10-13

3. Pushing the limits of EUV mask repair: addressing sub-10 nm defects with the next generation e-beam-based mask repair tool;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-09-07

4. Controlling hydrocarbon transport and electron beam induced deposition on single layer graphene: Toward atomic scale synthesis in the scanning transmission electron microscope;Nano Select;2021-07-31

5. Transformation and degradation of metal halide perovskites induced by energetic electrons and their practical implications;Nano Futures;2021-07-13

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