1. Chair Materials for Electrical Engineering and Electronics, Institute of Materials Science and Engineering and Institute of Micro and Nanotechnologies MacroNano, TU Ilmenau, Gustav-Kirchhoff-Str. 5, 98693 Ilmenau, Germany
2. Voxalytic GmbH, Rosengarten 3, 76228 Karlsruhe, Germany
3. Fachgebiet Technische Optik, Institute for Micro and Nanotechnologies MacroNano, TU Ilmenau, Helmholtzring 1, 98693 Ilmenau, Germany