Atomic Layer Deposition of Y2O3 Thin Films from Yttrium Tris(N,N‘-diisopropylacetamidinate) and Water
Author:
Affiliation:
1. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm050624%2B
Reference34 articles.
1. High-κ gate dielectrics: Current status and materials properties considerations
2. Optical properties of TiO2, Y2O3 and CeO2 thin films deposited by electron beam evaporation
3. A high performance MIM capacitor using HfO2 dielectrics
4. High-density MIM capacitors using Al2O3 and AlTiOx dielectrics
5. Rare-earth oxide thin films as gate oxides in MOSFET transistors
Cited by 143 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Development of Solid-Phase Epitaxy Techniques;Two-Dimensional Superconductivity in Rare Earth Oxybismuthides with Unusual Valent Bismuth Square Net;2023-12-07
2. Rational construction of dairy flower-like zinc oxide-doped yttrium molybdate for the electrochemical detection of uric acid;Chemical Papers;2023-11-20
3. Boronization: A General Strategy for Rare Earth Oxides with Enhanced High-κ Gate Dielectric Performance;ACS Applied Materials & Interfaces;2023-11-07
4. Fabrication and characterization of germanium n-MOS and n-MOSFET with thermally oxidized yttrium gate insulator: Formation of underlying germanium oxide and its electrical characteristics;Materials Science in Semiconductor Processing;2023-08
5. Ultrahigh and Tunable Negative Photoresponse in Organic‐Gated Carbon Nanotube Film Field‐Effect Transistors;Advanced Functional Materials;2023-07-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3