Direct Atomic Layer Deposition of Ternary Ferrites with Various Magnetic Properties
Author:
Affiliation:
1. Institute of Applied Physics, University of Hamburg, 20355 Hamburg, Germany
2. Max Planck Institute of Microstructure Physics, 06120 Halle, Germany
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm102600m
Reference21 articles.
1. Atomic Layer Deposition: An Overview
2. Daub, M.; Knez, M.; Gösele, U.; Nielsch, K.J. Appl. Phys. 2007, 101.
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4. Atomic layer deposition of transition metals
5. High Quality Area-Selective Atomic Layer Deposition Co Using Ammonia Gas as a Reactant
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