Nanofeature-Patterned Polymer Mold Fabrication toward Precisely Defined Nanostructure Replication
Author:
Affiliation:
1. Division of Nano Sciences and Department of Chemistry, Ewha Womans University, 11-1 Daehyun-Dong, Seodaemun-Gu, Seoul, 120-750, Korea
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0508569
Reference22 articles.
1. Step and flash imprint lithography: Template surface treatment and defect analysis
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4. Room-Temperature Imprint Lithography
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