A digital scanning Auger electron microscope incorporating a concentric hemispherical analyser-Reference-Cited by-同舟云学术

A digital scanning Auger electron microscope incorporating a concentric hemispherical analyser

Published:1977-10-24 Issue:1689 Volume:357 Page:213-230
ISSN:0080-4630
Container-title:Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences
language:en
Short-container-title:Proc. R. Soc. Lond. A

Author:

Abstract

A scanning electron microscope with a field-emitting electron gun, digitally controlled scanning and a concentric hemispherical energy analyser is described and compared with different types of energy dispersive scanning electron microscopes. The advantages of hemispherical analysers accessed by electrostatic lenses are flexible electron optical control of working distances and resolving power. A 4 element lens is described which results in an analyser with a 2 eV window over an energy range of 20 eV to 800 eV. Auger images of calcium and sulphur on titanium are given. Spatial resolutions of 50 nm and frame scan times of a few minutes are possible.

Publisher

The Royal Society

Subject

Pharmacology (medical)

Link

https://royalsocietypublishing.org/doi/pdf/10.1098/rspa.1977.0164

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