Pattern transfer using block copolymers
Author:
Affiliation:
1. Polymer Science and Engineering Department, University of Massachusetts at Amherst, 120 Governors Drive, Amherst, MA 01003, USA
2. Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA
Abstract
Publisher
The Royal Society
Subject
General Physics and Astronomy,General Engineering,General Mathematics
Link
https://royalsocietypublishing.org/doi/pdf/10.1098/rsta.2012.0306
Reference163 articles.
1. ITRS. 2011 International technology roadmap for semiconductors. See http://www.itrs.net.
2. Macroscopic 10-Terabit–per–Square-Inch Arrays from Block Copolymers with Lateral Order
3. Patterning and Templating for Nanoelectronics
4. Patterning with block copolymer thin films
5. Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
Cited by 73 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Two-dimensional directed lamellar assembly in silicon- and fluorine-containing block copolymer with identical surface energies;NPG Asia Materials;2023-12-29
2. Diversifying self-assembled phases in block copolymer thin films via blending;Physical Review Materials;2023-12-08
3. Directed Self-Assembly of Diamond Networks in Triblock Terpolymer Films on Patterned Substrates;ACS Applied Materials & Interfaces;2023-11-21
4. Preparation, Properties, and Bioapplications of Block Copolymer Nanopatterns;Advanced Healthcare Materials;2023-10-20
5. Nanoparticle Assembly: From Self‐Organization to Controlled Micropatterning for Enhanced Functionalities;Small;2023-09-29
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3