1. Institute for Microsensors, Actuators and Systems (IMSAS), University of Bremen, Bremen, Germany
2. EmpowerTech Inc., Iron Mountain, MI, USA
3. Department of Electrical Engineering, University of South Florida, Tampa, FL, USA
4. Microsystems Center Bremen (MCB), Bremen, Germany
5. Bremen Research Cluster for Dynamics in Logistics (LogDynamics), Bremen, Germany