Patterning of Polymer Nanocomposite Resists Containing Metal Nanoparticles by Electron Beam Lithography-Reference-Cited by-同舟云学术

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Patterning of Polymer Nanocomposite Resists Containing Metal Nanoparticles by Electron Beam Lithography

Published:2011-08-01 Issue:8 Volume:11 Page:7390-7393
ISSN:1533-4880
Container-title:Journal of Nanoscience and Nanotechnology
language:en
Short-container-title:J. Nanosci. Nanotech.

Author:

Lee Byoung-Min,Kang Dong-Woo,Jung Chan-Hee,Choi Jae-Hak,Hwang In-Tae,Hong Sung-Kwon,Lee Jae-Suk

Publisher

American Scientific Publishers

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,General Chemistry,Bioengineering

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Review of metal-containing resists in electron beam lithography: perspectives for extreme ultraviolet patterning;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-06-02

2. Direct nanopatterning of polymer/silver nanoblocks under low energy electron beam irradiation;Nanoscale;2016

3. Poly(vinylpyrrolidone) – A Versatile Polymer for Biomedical and Beyond Medical Applications;Polymer-Plastics Technology and Engineering;2015-01-06

4. The Fabrication of Patterned Gold Nanoparticle Arrays via Selective Ion Irradiation and Plasma Treatment;Journal of Nanoscience and Nanotechnology;2014-08-01

5. Poly(ethylene glycol) as a biointeractive electron-beam resist;Journal of Polymer Science Part B: Polymer Physics;2013-08

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