1. [1] International Technology Roadmap for Semiconductors 2007,http://strj-jeita.elisasp.net/strj/ITRS07/Roadmap-2007.htm
2. [2] Y. Kobayashi, H. Mangyo, H. Ono, T. Ikeda, K. Ikenaga, I. Matsumoto, K. Sugihara and K. Shibuya: Effects of Moisture Impurities in NH3 Gas on Nitride-Semiconductor Films Grown by Metal Organic Vapor Phase Epitaxy, Taiyo Nissan Giho (Technical Report of Taiyo Nissan), 26, 1-6 (2007) (in Japanese).http://www.tn-sanso.co.jp/jp/rd/report26.html
3. Techniques for the measurement of trace moisture in high-purity electronic specialty gases
4. [4] M. Stevens and R. Benyon: Conceptual design of a low-range humidity standard generator, Papers and Abstracts from the Third International Symposium on Humidity and Moisture, 1, 103-110 (1998).
5. Development of humidity standard in trace-moisture region: Characteristics of humidity generation of diffusion tube humidity generator