1. V. G. Mokerov Institute of Ultra High Frequency Semiconductor Electronics of the Russian Academy of Sciences, Nagornyi proezd, 7, p. 5 , Moscow, 117105, Russian Federation
2. Prokhorov General Physics Institute of the Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russian Federation
3. Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, Dolgoprudny, Moscow Region, 141701, Russian Federation
4. Osipyan Institute of Solid State Physics, Russian Academy of Sciences, Akademika Osip'yana str. 2, Chernogolovka, Moscow Region, 142432, Russian Federation