Measurement of Ion Sputtering Yields for In-depth Profiling Analysis-Reference-Cited by-同舟云学术

Measurement of Ion Sputtering Yields for In-depth Profiling Analysis

Published:1991 Issue:12 Volume:77 Page:2171-2178
ISSN:0021-1575
Container-title:Tetsu-to-Hagane
language:en
Short-container-title:Tetsu-to-Hagane

Author:

SUZUKI Toshiko¹,HIROKAWA Kichinosuke²,FUKUDA Yasuo³,SUZUKI Kenichi⁴,HASHIMOTO Satoshi⁵,USUKI Nariaki⁶,GENNAI Norio⁷,YOSHIDA Shizuo⁸,KODA Mitsuru⁹,SEZAKI Hiroshi¹⁰,HORIE Hiroshi¹¹,TANAKA Akihiro¹²,OHTSUBO Takashi¹³

Affiliation:

1. Analysis and Material Science Research Center, Kawasaki Steel Corp.

2. Institute for Materials Research, Tohoku University

3. Research Institute of Electronics, Shizuoka University

4. Advanced Materials & Technology Research Laboratories, Nippon Steel Corp.

5. Steel Research Center, NKK Corporation

6. Iron & Steel Research Laboratories, Sumitomo Metal Industries, Ltd.

7. KOBELCO Research Institute, Inc.

8. Central Research Laboratory, Daido Steel Co., Ltd.

9. Steel R & D Laboratories, Nisshin Steel Co., Ltd

10. Metallurgical Research Laboratory, Hitachi Metals Ltd.

11. Semiconductor Research Lab., Kyushu Electonic Metal Co. Ltd.

12. ULVAC-PHI Incorporated

13. The Japan Iron & Steel Federation

Publisher

Iron and Steel Institute of Japan

Subject

Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics

Link

https://www.jstage.jst.go.jp/article/tetsutohagane1955/77/12/77_12_2171/_pdf

Reference9 articles.

1. 3) P. SIGMUND : Phys. Rev., 184 (1969), p. 383

2. 4) H. H. ANDERSEN and H. L. BAY : Sputtering by Particle Bombardment I, ed. by R. BEHRISH (1981), p. 145 [ Springer-Verlag]

3. 6) N. MATUSNAMI, Y YAMAMURA, Y ICHIKAWA, N. ITOH, Y. KAZUMATA, S. MIYAGAWA, K. MORITA and R. SHIMIZU : Report IPPJ-AM-14 (1980) [Institute of Plasma Physics, Nagoya University]

4. 7) T. OHTSUBO, K. HIROKAWA, Y. FUKUDA, Y. OH-HASHI, N. USUKI, N. GENNAI, H. ISHIDA, S. YOSHIDA. Y. SEKIMOTO and K. SUZUKI : Trans. Iron Steel Inst. Jpn., 27 (1987), p. 60

5. 8) J. FERRON, E. V. ALONSO, R. A. BARAGIOLA and A. O.-FL0RIO : J. Phys. D, Appl. Phys., 14 (1981), p. 1707

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