Application of Cl2/BCl3/Ar Plasma Treatment in the Improvement of Ti/Al/Mo/Au Ohmic Contacts-Reference-Cited by-同舟云学术

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Application of Cl2/BCl3/Ar Plasma Treatment in the Improvement of Ti/Al/Mo/Au Ohmic Contacts

Published:2016-06-16 Issue:2 Volume:14 Page:
ISSN:1804-3119
Container-title:Advances in Electrical and Electronic Engineering
language:
Short-container-title:AEEE

Author:

Gryglewicz Jacek,Macherzynski Wojciech,Stafiniak Andrzej,Paszkiewicz Bogdan,Paszkiewicz Regina

Publisher

VSB - Technical University of Ostrava

Subject

Electrical and Electronic Engineering

Link

http://advances.vsb.cz/public/published/1589-9384-1-PB.pdf

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Methods for processing structures based on solid solutions of AIIIBV compounds;IOP Conference Series: Materials Science and Engineering;2019-11-01

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