Evaluation of piezoresistivity properties of sputtered ZnO thin films
Author:
Affiliation:
1. Instituto Tecnológico de Aeronáutica, Brasil
2. Faculdade de Tecnologia de São Paulo, Brasil
3. Instituto Tecnológico de Aeronáutica, Brasil; Universidade Federal de São Paulo, Brasil
Publisher
FapUNIFESP (SciELO)
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
http://www.scielo.br/pdf/mr/v17n3/aop_matres_211913.pdf
Reference16 articles.
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2. Top-gate ZnO thin-film transistors with a polymer dielectric designed for ultraviolet optical gating;Lee K;Sensors and Actuators A: Physical,2008
3. Sensing mechanism of hydrogen gas sensor based on RF-sputtered ZnO thin films;Al-Hardan NH;International Journal of Hydrogen Energy,2010
4. Structures and SAW properties of rf-sputtered single-crystal films of ZnO on sapphire;Mitsuyu T;Journal of Applied Physics,1980
5. Investigation of piezoelectric ZnO film deposited on diamond like carbon coated onto Si substrate under different sputtering conditions;Tang IT;Journal of Crystal Growth,2003
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