Characterization of SiC thin films deposited by HiPIMS-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Characterization of SiC thin films deposited by HiPIMS

Published:2014-04-01 Issue:2 Volume:17 Page:472-476
ISSN:1980-5373
Container-title:Materials Research
language:
Short-container-title:Mat. Res.

Author:

Leal Gabriela¹,Campos Tiago Moreira Bastos¹,Silva Sobrinho Argemiro Soares da¹,Pessoa Rodrigo Sávio²,Maciel Homero Santiago³,Massi Marcos⁴

Affiliation:

1. Instituto Tecnológico de Aeronáutica, Brazil

2. Universidade do Vale do Paraíba, Brazil

3. Instituto Tecnológico de Aeronáutica, Brazil; Universidade do Vale do Paraíba, Brazil

4. Instituto Tecnológico de Aeronáutica, Brazil; Universidade Federal de São Paulo, Brazil

Publisher

FapUNIFESP (SciELO)

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://www.scielo.br/pdf/mr/v17n2/aop_matres_211513.pdf

Reference23 articles.

1. SiC film deposition by DC magnetron sputtering;Gou L;Thin Solid Films,1999

2. Proceedings of the 29th International conference on Metallurgical Coatings and Thin Films;Costa AK;Surface and Coatings Technology,2003

3. Fabrication and characterization of a SiC/SiO2/Si piezoresistive pressure sensor;Fraga MA;Procedia Engineering,2010

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low-pressure high-current magnetron discharge with electron injection: From self-sputtering with multiply charged metal ions to non-sputtering with “pure” gas ions;Vacuum;2024-10

2. Magnetically-supported electrically-induced formation of silicon carbide nanostructures on silicon substrate for optoelectronics applications;Optical and Quantum Electronics;2022-06-09

3. Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique;Nanomaterials;2022-02-01

4. Structural and mechanical properties of amorphous Si–C-based thin films deposited by pulsed magnetron sputtering under different sputtering powers;Vacuum;2021-09

5. Variation Resistance of different operation temperature of NO2 and NH3 gases for the Ag-doped SiC gas sensor;Journal of Physics: Conference Series;2021-08-01

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3