Abstract
AbstractThe structural, electrical and optical properties of amorphous Si-Ge alloys prepared either from mixtures of hydrides or of fluorides will be compared. It will be shown that the majority of many properties studied are essentially the same, the major exceptions being the structure of thin films used for TEM investigation, and the photocurrents developed between contacts in a coplanar configuration. Possible explanations for the result of including fluorine in the preparation plasma will be discussed.
Publisher
Springer Science and Business Media LLC
Reference8 articles.
1. Mobility–lifetime estimates in amorphous hydrogenated silicon (a-Si:H)
2. Structural, electrical, and optical properties ofa-Si1−xGex:H and an inferred electronic band structure
3. Preparation of photoconductive a-SiGe alloy by glow discharge
4. Properties of a-Si1−xGex:H and a-Si1−xGex:H:F alloys
5. 6. Bork V. P. , Fedders P. A. , Norberg R. E. , Leopold D. J. , Mackenzie K. D. and Paul W. , in Material Issues in Applications of Amorphous Sililcon Technology ( Adler D. , Hamakawa Y. and Madan A. editors), Mat. Res. Soc. Symp. Proc. 70, 307 (1986).
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