Author:
Kaneko S.,Kajiwara Y.,Okumura F.,Ohkubo T.
Abstract
AbstractThis paper reports heterojunction photodiode properties and its application to a compact scanner. The photodiode has ITO / p-a-SiC:H / a-Si:H / metal structure. This diode has high photo to dark current ratio and small photocurrent saturation voltage, because of the excellent blocking characteristics for a heterojunction with large built in potential. Moreover, a-Si:H / metal contact has been investigated. A contact linear image sensor has been fabricated using the heterojunction photodiode array and compact optical system. Performance tests showed excellent results. Good reproduced images have been obtained.
Publisher
Springer Science and Business Media LLC
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