The Composition Dependence of the Interdiffusivity in Artificial Amorphous Si/Ge Multilayers-Reference-Cited by-同舟云学术

The Composition Dependence of the Interdiffusivity in Artificial Amorphous Si/Ge Multilayers

Published:1986 Issue: Volume:77 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

Prokes S. M.,Spaepen F.

Abstract

ABSTRACTThe interdirfusivity in artificial amorphous Si/Ge multilayers is found to be strongly dependent on the average composition of the films. The interdirfusivity of films with different average composition was determined from the decay of the first X-ray satellite. The nonlinear diffusion resulting from the composition dependence was observed by the evolution of the higher-order satellites.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

Reference15 articles.

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3. DIFFUSION

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5. Interdiffusion in Si/Ge amorphous multilayer films

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4. Stability of Artificial Multilayers;Physics, Fabrication, and Applications of Multilayered Structures;1988