Abstract
ABSTRACTThis paper discusses the attributes of metal silicides as they are applied to detection of infrared photons. These materials have a long history in the silicon community as interconnects and are easily integrated into manufacturing. The technology is currently only sensitive to 10 μm in the infrared. New results obtained from silicon germanium alloys are discussed that will help overcome these spectral limitations.
Publisher
Springer Science and Business Media LLC
Reference17 articles.
1. 13. Cohen J. , Vilms J. , Archer R. J. , “Investigation of Semiconductor Schottky Barriers for Optical Detection and Cathodic Emission”, Final Report AFCRL-68-0651, DTIC No. AD-682522, 1968.
2. Crystallography of PtSi films on (001) silicon
3. The work function of the elements and its periodicity
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献