Amorphous Hydrogenated Silicon P-I-N Solar Cells Grown from Hydrogen-Diluted Silane

Abstract

ABSTRACTWe investigated p-i-n solar cells in which the i-layer was grown from hydrogen-diluted silane. The deposition parameters which were varied include flow rates, deposition pressure and power, and the degree of hydrogen dilution. We found that high quality devices could be made in which the i-layer was grown under a wide range of deposition conditions but that over this range neither the initial performance nor the stability of the devices differed significantly from those of cells having the same structure, but in which the i-layer was deposited from SiH4 with no H2-dilution.