Measurements of the Transient Photoconductivity During the Growth of A-Si:H Multilayers

Abstract

ABSTRACTThe deposition process of multiple layer structures of intrinsic and p-type hydrogenated amorphous silicon was followed by measuring the microwave detected transient photoconductivity (TRMC) during the film growth. In an i-p-i structure we can show that after deposition of an upper layer of about 500 nm, former deposited layers do not influence the TRMC-signal any more. In an i-p+-i-p structure we can clearly distinguish between p-layers of different doping concentration.