Solid State Reaction of Sputter Deposited Crystalline Multilayers of Ni and Zr

Abstract

AbstractWe have prepared sputtered metallic films comprised of alternating layers of pure Ni and Zr to a total thickness of several microns. Due to the negative beat of mixing of crystalline Ni and Zr and a significant intermixing rate we have been able to form an amorphous Ni-Zr phase by a solid state reaction. In this work we report the conditions under which a substantial fraction of amorphous material may be formed. The extent of the reaction itself as a function of time has also been monitored.