Catalytic Forming Gas Anneal on III-V/Ge MOS Systems

Abstract

AbstractCatalytic-FGA, a combination of the standard forming gas anneal with a catalytic metal gate, has been applied to study the hydrogen passivation of III-V/Ge MOS systems. Pd (or Pt) metal gate catalytically dissociates molecular hydrogen into atomic hydrogen atoms, which then diffuse through the dielectric layer and neutralize certain semiconductor/dielectric interfacial defects. MOS systems with various interfacial qualities, including lattice-matched (n/p) In0.53Ga0.47As/10nm ALD-Al2O3 (or ZrO2)/Pd capacitors, an undoped Ge/˜1nm GeO2/4nm ALD-Al2O3/Pt capacitor, and an nGe/8nm ALD-Al2O3/Pt capacitor are fabricated to evaluate the effectiveness of C-FGA.