Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4 plasma at low temperature-Reference-Cited by-同舟云学术

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Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4 plasma at low temperature

Published:2012-02-16 Issue:9 Volume:27 Page:1303-1313
ISSN:0884-2914
Container-title:Journal of Materials Research
language:en
Short-container-title:J. Mater. Res.

Author:

Das Debajyoti,Raha Debnath,Chen Wei-Chao,Chen Kuei-Hsien,Wu Chien-Ting,Chen Li-Chyong

Abstract

Abstract

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference41 articles.

1. Controlling the growth of nanocrystalline silicon by tuning negative substrate bias

2. Plasma emission diagnostics for the transition from microcrystalline to amorphous silicon solar cells

3. Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration

4. Influence of target direct current bias voltage on the film structure of hydrogenated microcrystalline silicon prepared by direct current–radiofrequency coupled magnetron sputtering

5. Thin-Film Growth and the Shadow Instability

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1. Growth of diamond-like carbon films with significant nanocrystalline phases in a low-pressure high-density CH4 plasma in ICP-CVD: Effect of negative dc substrate bias;Applied Surface Science;2022-09

2. Room temperature synthesized highly conducting B-doped nanocrystalline silicon thin films on flexible polymer substrates by ICP-CVD;Applied Surface Science;2022-05

3. Synthesis of nanocrystalline diamond embedded diamond-like carbon films on untreated glass substrates at low temperature using (C2H2 + H2) gas composition in microwave plasma CVD;Applied Surface Science;2022-03

4. Growth of Nanostructured Diamond Films on Glass Substrates by Low-Temperature Microwave Plasma-Enhanced Chemical Vapor Deposition for Applications in Nanotribology;ACS Applied Nano Materials;2022-02-18

5. Spectroscopic studies of low-temperature synthesized nanocrystalline silicon oxy-carbide thin films;Materials Today: Proceedings;2022

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