Plasma emission diagnostics for the transition from microcrystalline to amorphous silicon solar cells-Reference-Cited by-同舟云学术

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Plasma emission diagnostics for the transition from microcrystalline to amorphous silicon solar cells

Published:2005-05 Issue:1-4 Volume:87 Page:795-805
ISSN:0927-0248
Container-title:Solar Energy Materials and Solar Cells
language:en
Short-container-title:Solar Energy Materials and Solar Cells

Author:

Amanatides E.,Mataras D.,Rapakoulias D.,van den Donker M.N.,Rech B.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Complete microcrystallinep‐i‐nsolar cell—Crystalline or amorphous cell behavior?

2. Comprehensive study of microcrystalline silicon solar cells deposited at high rate using 13.56 MHz plasma-enhanced chemical vapor deposition

3. Dissociative excitation of SiH4 by electron impact: emission cross sections for fragment species

4. Particle simulations of radio-frequency glow discharges

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1. Using optical emission spectroscopy (OES) to monitor In-line very high-frequency plasma enhanced chemical vapor deposition (VHF-PECVD) technique optoelectrical properties;2019 Compound Semiconductor Week (CSW);2019-05

2. Performance control for amorphous silicon germanium alloys by in situ optical emission spectroscopy;Thin Solid Films;2018-08

3. Utility of dual frequency hybrid source for plasma and radical generation in plasma enhanced chemical vapor deposition process;Japanese Journal of Applied Physics;2015-06-03

4. Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering;Japanese Journal of Applied Physics;2015-05-29

5. Plasma diagnostic approach for high rate nanocrystalline Si synthesis in RF/UHF hybrid plasmas using a PECVD process;Plasma Sources Science and Technology;2015-03-09

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