Author:
Uchida Kazuo,Tokunaga Hiroki,Inaishi Yoshiaki,Akutsu Nakao,Matsumoto Koh,Itoh Tsuyoshi,Egawa Takashi,Jimbo Takashi,Umeno Masayoshi
Abstract
ABSTRACTWe introduce III-V nitrides growth including GaN as well as InGaN by a newly developed atmospheric-pressure metal-organic vapor phase epitaxy system with a three layered flow channel which is a promising system for a large scale production. First, we have shown through computer simulation that a laminar flow of gases is maintained at 1000 °C in the three layered flow channel. Second, as a part of epitaxial results, we have found that the surface roughness of a low temperature-grown buffer layer on sapphire substrates, which can be measured by atomic force microscope, should be minimum in order to grow high quality GaN. We also report the growth of a double heterostructure of Ino. 15Gao.85N/GaN which shows a strong near band-edge emission in room temperature photoluminescence.
Publisher
Springer Science and Business Media LLC
Reference6 articles.
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2. Structural evolution in epitaxial metalorganic chemical vapor deposition grown GaN films on sapphire
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