Deflection Shapes Due to Intrinsic Stress in Thin Films

Author:

Masters Christine B.,Salamon N. J.,Fahnline D. E.

Abstract

ABSTRACTThe curvatures of thin film/substrate systems are obtained for a nonlinear plate deflection model using a Galerkin minimization procedure proposed by Hyer. A fifth order polynomial involving the curvatures is given. The results show that the linear models of Stoney and Brenner and Senderoff apply only at low stress states and that stable and unstable configurations develop at higher stresses even for isotropic systems.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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