Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue
Author:
Abstract
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference49 articles.
1. Effects of barrier layer and annealing on abnormal grain growth in copper thin films
2. Observation of twin boundary migration in copper during deformation
3. Thermal Expansion of Copper from 20 to 800 K—Standard Reference Material 736
4. High-Temperature Characterization of Silicon Dioxide Films with Wafer Curvature
5. Fatigue in thin films: lifetime and damage formation
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Intragranular thermal fatigue of Cu thin films: Near-grain boundary hardening, strain localization and voiding;Acta Materialia;2023-07
2. Fatigue life assessment of metal foils in multifunctional composites via combined experiments and simulations;Composites Part B: Engineering;2023-06
3. Fatigue of copper films subjected to high-strain rate thermo-mechanical pulsing;Microelectronics Reliability;2022-10
4. Multi-phase-field modeling of grain growth in polycrystalline titanium under magnetic field and elastic strain;Applied Physics A;2022-09-11
5. Applying a Statistical Model to the Observed Texture Evolution of Fatigued Metal Films;IEEE Transactions on Device and Materials Reliability;2020-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3