Author:
Kimura Shin-Ichiro,Murakami Eiichi,Warabisako Terunori,Mitani Eisuke,sunami Hidho
Abstract
AbstractThe oxygen migration process during microwave-discharge plasma oxidation of Si is investigated using 18O as a tracer. The exchange phenomena between migrating oxygen and its counterpart in SiO2 are observed. When plasma grown oxide (Si 18O2) is further oxidized in 18O-enriched plasma. 18O is observed both at the SiO2 /Si interface and in the bulk of Si16O2. For the reversed case. i.e. Si18 O2 is oxidized in 18O plasma, the total amount of pre-existing 18O decreases. The suppression of 18O is more drastic in the surface region. These oxygen distributions indicate that oxygen migrates toward the interface accompanied by oxygen exchange.
Publisher
Springer Science and Business Media LLC