Abstract
ABSTRACTA new method for selective metal deposition on aluminum nitride (AIN) is presented. Excimer laser radiation is used for local decomposition of AIN in air. The degree of the surface modification depends on the fluence and number of pulses. A distinct wavelength dependence of the threshold fluence decomposition of AIN was found. The irradiated surface regions act as catalysts in conventional electroless metal plating baths. Structured metal coatings of various elements (Cu, Ni, Au, Pd, etc.) on AIN can thus be obtained in a simple way.
Publisher
Springer Science and Business Media LLC
Cited by
17 articles.
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