In-Situ Quality Control of the Production of Semiconductor Devices by Microwave Photoconductivity Measurements

Abstract

ABSTRACTThe application of transient photoconductivity measurements in the microwave frequency range to the characterization of semiconductors and semiconductor devices is analyzed. Quality control and in-situ optimization are discussed from a more general point of view and as a concrete example the optimization of the deposition of amorphous silicon films is presented.