A Technique for Preparing “Two in One” Cross-Sectional TEM Specimens

Abstract

ABSTRACTA modified “two-in-one” cross-sectional TEM sample preparation technique is described. By coating a thin layer of “marker” to distinguish one sample from the other, two samples could be simultaneously prepared in one TEM cross-sectional specimen. Therefore, the specimen preparation time is reduced by nearly one half. The coating can be done in an existing ion-mill. Criteria for choosing a suitable marker as well as tips on getting good quality specimens are described. An example of applying this technique to a processing-microstructure study of an ultra-shallow junction formation in silicon is demonstrated.