Author:
Klee M.,Wissen D.,Keur W.,Kiewitt R.,Bausen D.,Lok P.
Abstract
AbstractSingle oxide films as well as complex oxide films are intensively studied for multi-chip modules with integrated passive functions. In this paper the processing and properties of oxide films such as Ta2O5, TiO2, Nb2O5, Ta2O5 -Al2O3, Ta2O5–Nb2O5 as well as complex oxide films such as BiNbO4 and Ba1划xSrxTiO3 films will be discussed with respect to their integration into thin film functional modules.
Publisher
Springer Science and Business Media LLC
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献