Probing Process-Induced Defects in Si Using Infrared Photoelastic Stress Measurement Technique

Abstract

AbstractThe stress depth distribution in the silicon substrate under thin thermal oxide layers has been measured using the photoelastic technique. With the high sensitivity and improved spatial resolution of a newly developed low level birefringence detection system, it is confirmed that the stress distribution deviates significantly from the linear distribution predicted by classical bi-metallic strip theory. The deviation can be attributed to arising from Si self-interstitial injection during the thermal oxidation process. Long term changes in the stress distribution with time have also been observed and the changes can be understood in terms of point defect movements under the stress field in the substrate. Our preliminary results have demonstrated how we can probe microscopic point defect processes in thin film SiO2/Si substrate systems using a macroscopic photoelastic stress measurement technique.