Author:
Ballal A.K.,Salamanca-Riba L.,Doll G.L.,Taylor C.A.,Clarke R.
Abstract
We report on oriented and adherent cubic BN films grown on (001) faces of silicon using the method of ion-assisted pulsed laser deposition. The structure of the films is cubic zinc-blende with a lattice constant of 3.62 Å, as determined by infrared absorption and transmission electron microscopy. The films were found to be polycrystalline, and oriented with the cubic BN [110] axis parallel to the Si [001] direction.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
53 articles.
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