Thermodynamic analysis for the chemical vapor deposition of composite coatings from the Al–B–Ti–N–H–Cl–Ar system

Abstract

Thermodynamic calculations were performed for chemical vapor deposition in the Al–B–Ti–N–H–Cl–Ar system in order to determine the feasibility of multiphase deposition. Reagent species used were BCl3, AlCl3, TiCl4, NH3, H2, and Ar; B2 was substituted for BCl3 to determine changes in deposition efficiency. Temperature and input molar concentrations were varied over a range of values to establish relationships among solid deposits. Through deposition diagrams, molar efficiency plots, and partial pressure graphs, several two and three phase regions were found to exist. The calculations indicate that the following dispersed phase composites could be prepared: A1N + BN + TiN, BN + TiN, BN + TiB2, BN + TiB2 + TiN, and TiB2 + TiN.