Carbon-based Materials as Key-enabler for “More Than Moore”

Abstract

ABSTRACTCarbon-based materials like nanotubes and graphene are heavily investigated as future transistor devices and in interconnect applications. While much of the interest has been devoted to the device aspects in competition to conventional transistors, the paper here will focus on some less known applications of pyrolytically deposited carbon. Proposed and demonstrated are applications in capacitors, gate materials, through-silicon vias, novel non-volatile memories, carbon-silicon Schottky diodes and sensors.