Interface Stress in Artificial Multilayers

Abstract

ABSTRACTA new method for measuring interface stress is presented. The curvature of substrates coated with artificial multilayers is measured as a function of bilayer repeat length. The interface stress is determined from the slope of the curvature plotted versus inverse repeat length. As an example, the (111) Au/amorphous Al2O3 interface stress was determined to be 1.13±0.06 J/m2 (compressive) . X-ray and TEM observations allowed the possibility of interfacial phases to be ruled out as possible alternative sources of the stress.