Stress in dc sputtered TiN/B–C–N multilayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365211
Reference12 articles.
1. Relationship between Interfacial Strain and the Elastic Response of Multilayer Metal Films
2. Elastic strains and coherency stresses in Mo/Ni multilayers
3. Surface stress effects on the critical film thickness for epitaxy
4. Effects of surface stress on the elastic moduli of thin films and superlattices
5. Bulk and interface stresses in silver‐nickel multilayered thin films
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