Author:
Chu Wei-Kan,Allen W. R.,Picraux S. T.,Ellison J. A.
Abstract
AbstractIon beam channeling analysis has recently been applied to lattice strain measurements on strained-layer superlattices (SLS). In this review talk, we outline three different methods of strain measurement: axial dechanneling, angular scans, and planar resonance. We describe the principles and illustrate them with examples; we also give a detailed theoretical treatment of the planar resonance effect in SLS's.
Publisher
Springer Science and Business Media LLC