Deposition Temperature and Optoelectronic Properties of a-Si:H Films

Abstract

ABSTRACTIn the present work the change of the opto-electronic properties of intrinsic a-Si:H films as a function of their deposition temperature is investigated by transient photoconductivity measurements with the contactless Time Resolved Microwave Conductivity (TRMC) technique. As well in-situ as ex-situ TRMC-measurements will be presented. It is concluded that the electron drift mobility for a-Si:H films deposited in the temperature range between 200° C and 300° C does not depend on the deposition temperature. For temperatures below 200° C the electron drift mobility decreases with decreasing deposition temperature. Annealing of opto-electronic properties of intrinsic a-Si:H films deposited at lower temperatures is observed.