A New Synchrotron-based Technique for Measuring Stresses in Ultrathin Metallic Films

Abstract

AbstractA novel synchrotron-based X-ray diffraction technique is presented by which it is possible to characterize the evolution of stresses in polycrystalline metallic films thinner than 100 nm. The film under investigation is deposited on a flexible polyimide substrate which is subjected to a uniaxial tensile test. The evolutions of longitudinal and transverse elastic strains in the film are monitored simultaneously by means of a high-resolution area detector. The strain resolution is better than 10−4. The samples are typically subjected to 6 % total strain and subsequently unloaded. First experiments carried out on Au films in the thickness range between 20 nm and 1000 nm show the usefulness and the power of this new technique.