Thermodynamic analysis for the chemical vapor deposition of composite coatings from the Al–B–Ti–N–H–Cl–Ar system

Author:

Moss T.S.,Hanigofsky John A.,Lackey W.J.

Abstract

Thermodynamic calculations were performed for chemical vapor deposition in the Al–B–Ti–N–H–Cl–Ar system in order to determine the feasibility of multiphase deposition. Reagent species used were BCl3, AlCl3, TiCl4, NH3, H2, and Ar; B2 was substituted for BCl3 to determine changes in deposition efficiency. Temperature and input molar concentrations were varied over a range of values to establish relationships among solid deposits. Through deposition diagrams, molar efficiency plots, and partial pressure graphs, several two and three phase regions were found to exist. The calculations indicate that the following dispersed phase composites could be prepared: A1N + BN + TiN, BN + TiN, BN + TiB2, BN + TiB2 + TiN, and TiB2 + TiN.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference67 articles.

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